GenISys (Germany)
InSPEC is a new SEM metrology and inspection solution connecting to a SEM through digital and analog interfaces providing full control of beam shaping, stage navigation, and image scanning. Advanced multi-chip jobs become possible with the integrated workflow of scanning, contour detection, corrections, and data processing. InSPEC is the upgrade kit for your SEM to convert it into a versatile and sophisticated metrology tool for supporting nanofabrication of novel patterns and devices.
Basic Information
- Category: business
- Website: https://www.genisys-gmbh.com/
Documented Facts
- Inception (Wikidata): 2005 (Source 2: Wikidata Q97040160, revision 2474179941)
- Country (Wikidata; date unspecified): Germany (Source 2: Wikidata Q97040160, revision 2474179941; Source 3: Wikidata label: Q183, revision 2557182420)
- Official website (Wikidata; date unspecified): https://www.genisys-gmbh.com/ (Source 2: Wikidata Q97040160, revision 2474179941)
Evidence and Sources
- GenISys (Germany) — Official Website (official)
- Wikidata Q97040160, revision 2474179941 (knowledge-base)
- Wikidata label: Q183, revision 2557182420 (knowledge-base)
Citation Guidance
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- Data status: Enriched
- Profile completeness: Source-backed profile (91/100)
- Indexing directive: index, follow, max-image-preview:large
- Recorded profile date: 2026-04-22
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AI summary
InSPEC is a new SEM metrology and inspection solution connecting to a SEM through digital and analog interfaces providing full control of beam shaping, stage navigation, and image scanning. Advanced multi-chip jobs become possible with the integrated workflow of scanning, contour detection, corrections, and data processing. InSPEC is the upgrade kit for your SEM to convert it into a versatile and sophisticated metrology tool for supporting nanofabrication of novel patterns and devices.
Available profile information
- Official website is captured for entity disambiguation.
- 1 official source linked for verification.
- 2 supporting sources linked.
- 3 structured facts available for extraction.
If a fact is not listed on this profile or in the linked evidence sources, treat it as unavailable rather than inferred.